It's true that marketing sort of ran away with it but it's important to note that the original idea was sound and didn't have to do with marketing hype. "Process shrinks" require many different industries to coordinate or else nothing can get done, and the ITRS roadmap was meant to be the mechanism to accomplish that coordination. What happened was that not long after it was introduced the actual feature sizes diverged from the names on the roadmap, but they decided to just keep using the roadmap names because the need for coordination didn't actually go away and, well, the names were right there, why bother changing them.
The end result seems crazy now but it's the result a set of decisions that were individually rational, not marketing-driven, at each step.
It's fine, there's a roadmap for it -
"the 1000 quark" node should last as a good 10, 15 years until we get to "1 quark"
Then we move onto the "10,000 planck length node". That should easily get us to the end of Moore's law.
The end result seems crazy now but it's the result a set of decisions that were individually rational, not marketing-driven, at each step.